Art
J-GLOBAL ID：200902142799829089   Reference number：98A0684900

Transport properties of unintentionally doped iron silicide thin films on silicon(111).

シリコン(111)上の非意図的ドーピングけい化鉄薄膜の輸送特性
Author (2)：
MURET P

About MURET P

(Lab. Etudes des Propri<span style=text-decoration:overline>e ́</span>t<span style=text-decoration:overline>e ́</span>s Electroniques des Solides, C.N.R.S., Grenoble, FRA)

About Lab. Etudes des Propri<span style=text-decoration:overline>e ́</span>t<span style=text-decoration:overline>e ́</span>s Electroniques des Solides, C.N.R.S., Grenoble, FRA

, 
ALI I

About ALI I

(Lab. Etudes des Propri<span style=text-decoration:overline>e ́</span>t<span style=text-decoration:overline>e ́</span>s Electroniques des Solides, C.N.R.S., Grenoble, FRA)

About Lab. Etudes des Propri<span style=text-decoration:overline>e ́</span>t<span style=text-decoration:overline>e ́</span>s Electroniques des Solides, C.N.R.S., Grenoble, FRA


Material：
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)

About Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures


Volume： 16  Issue： 3  Page： 1663-1666  Publication year： May. 1998 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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silicon

About silicon

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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forbidden band

About forbidden band


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Semiconductor thin films 
(BK14040E)

About Semiconductor thin films

,  Electric conduction in crystalline semiconductors 
(BM03043X)

About Electric conduction in crystalline semiconductors

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
シリコン

About シリコン

, 
意図

About 意図

, 
ドーピング

About ドーピング

, 
けい化鉄

About けい化鉄

, 
薄膜

About 薄膜

, 
輸送特性

About 輸送特性


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