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J-GLOBAL ID：200902142985593710   Reference number：94A0081646

Evaluation Method for Optical Projection Lithography.

投影光学系リソグラフィーの評価法
Author (1)：
SHIBUYA MASATO

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(ニコン)

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Material：
光学  (Japanese Journal of Optics)

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Volume： 23  Issue： 1  Page： 29-37  Publication year： Jan. 1994 
JST Material Number： G0125B  ISSN： 0389-6625  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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photolithography

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,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

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,  Image formation and analysis 
(BD03050I)

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Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
投影光学系

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, 
リソグラフィー

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, 
評価法

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