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J-GLOBAL ID:200902143495568269   Reference number:97A0646484

Control of material removal mechanism in machining of brittle material.

脆性材料の機械加工における材料除去機構の制御
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Volume: 49  Issue:Page: 731-737  Publication year: Jul. 1997 
JST Material Number: F0147A  ISSN: 0368-5713  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Cutting in general  ,  Manufacturing technology of solid-state devices 
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