Light-induced annealing of dangling bonds in He-diluted glow discharge a-Si:H films.

TAKEDA K; HIKITA H; KONDO A; GANJOO A; SHIMAKAWA K; MORIGAKI K

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J-GLOBAL ID：200902143605643555 Reference number：99A0075135

Light-induced annealing of dangling bonds in He-diluted glow discharge a-Si:H films.

He希釈グロー放電a-Si:H膜におけるダングリングボンドの光誘起アニーリング

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Material：
Volume： 227/230 Issue： Pt.A Page： 311-315 Publication year： May. 1998
JST Material Number： D0642A ISSN： 0022-3093 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Structure of amorphous semiconductors , EPR of metals and semiconductors

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