Art
J-GLOBAL ID：200902144129646474   Reference number：96A0909175

The effects of oxygen content on electrical and optical properties of indium tin oxide films fabricated by reactive sputtering.

反応性スパッタリングによって作製した酸化インジウムすず膜の電気的および光学的特性に及ぼす酸素含有量の効果
Author (3)：
HONDA S

About HONDA S

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN

, 
WATAMORI M

About WATAMORI M

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN

, 
OURA K

About OURA K

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN


Material：
Thin Solid Films

About Thin Solid Films


Volume： 281/282  Issue： 1/2  Page： 206-208  Publication year： Aug. 01, 1996 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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reactive sputtering

About reactive sputtering

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
ITO(solid solution)

About ITO(solid solution)


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JST classification (1)：
JST classification
Category name(code) classified by JST.
Oxide thin films 
(BK14050P)

About Oxide thin films

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
反応性スパッタリング

About 反応性スパッタリング

, 
作製

About 作製

, 
酸化インジウムすず

About 酸化インジウムすず

, 
光学的特性

About 光学的特性

, 
酸素含有量

About 酸素含有量


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