Transparent and conductive Ga-doped ZnO films grown by low pressure metal organic chemical vapor deposition.

LI Y; TOMPA G S; LIANG S; GORLA C; LU Y; DOYLE J

Art

J-GLOBAL ID：200902146350520011 Reference number：97A0742898

Transparent and conductive Ga-doped ZnO films grown by low pressure metal organic chemical vapor deposition.

低圧有機金属化学蒸着により成長させた透明導電性のGaドープZnO膜

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Author (6)： , , , , ,
Material：
Volume： 15 Issue： 3 Pt 1 Page： 1063-1068 Publication year： May. 1997
JST Material Number： C0789B ISSN： 0734-2101 CODEN： JVTAD6 Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Oxide thin films , Electric conduction in crystalline semiconductors

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