Art
J-GLOBAL ID：200902146466910372   Reference number：00A0389281

Materials issues in microelectromechanical systems(MEMS).

マイクロ電気機械系(MEMS)における材料問題
Author (1)：
SPEARING S M

About SPEARING S M

(Massachusetts Inst. Technol., MA, USA)

About Massachusetts Inst. Technol., MA, USA


Material：
Acta Materialia  (Acta Mater)

About Acta Materialia


Volume： 48  Issue： 1  Page： 179-196  Publication year： Jan. 01, 2000 
JST Material Number： A0316A  ISSN： 1359-6454  Document type： Article
Article type： 文献レビュー  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
Thesaurus term：
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All keywords is available on JDreamIII(charged).
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*solid state device

About solid state device

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
transducer

About transducer

,...
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  Materials of solid-state devices 
(NC03020K)

About Materials of solid-state devices

,  Piezoelectric devices 
(NC03110I)

About Piezoelectric devices

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
マイクロ

About マイクロ

, 
電気機械

About 電気機械

, 
MEMS

About MEMS


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