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J-GLOBAL ID:200902147658626593   Reference number:00A0001548

Improvement of the thermal stability of amorphous carbon films by incorporation of nitrogen.

窒素の取り込みによる非晶質炭素膜の熱安定性の改善
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Volume: 353  Issue: 1/2  Page: 157-165  Publication year: Sep. 29, 1999 
JST Material Number: B0899A  ISSN: 0040-6090  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Thin films of other inorganic compounds 
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