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J-GLOBAL ID：200902148070304324   Reference number：97A0624256

Early stage growth of hydrogenated amorphous carbon.

水素化非晶質炭素の初期成長
Author (3)：
AZUMA K

About AZUMA K

(Hitachi, Ltd., Yokohama, JPN)

About Hitachi, Ltd., Yokohama, JPN

, 
SHIRAI H

About SHIRAI H

(Saitama Univ., Urawa, JPN)

About Saitama Univ., Urawa, JPN

, 
KOUCHI T

About KOUCHI T

(Atago Bussan Ltd., Tokyo, JPN)

About Atago Bussan Ltd., Tokyo, JPN


Material：
Thin Solid Films

About Thin Solid Films


Volume： 296  Issue： 1/2  Page： 72-75  Publication year： Mar. 1997 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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semiconductor thin film

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,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Semiconductor thin films 
(BK14040E)

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Terms in the title (3)：
Terms in the title
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水素化

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, 
非晶質炭素

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, 
初期成長

About 初期成長


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