Art
J-GLOBAL ID：200902149041790844   Reference number：01A0047479

Maskless pattern forming by combined use of micro machining and etching using the frictional force microscope.

摩擦力顕微鏡を用いた微細機械加工とエッチングの併用によるマスクレスパターン成形
Author (1)：
ASHIDA KIWAMU

About ASHIDA KIWAMU

(機械技研)

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Material：
機械研News  (機械研ニュース)

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Issue： 11  Page： 4-7  Publication year： 2000 
JST Material Number： G0033A  ISSN： 0286-2271  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*micromachining

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,...
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Thesaurus term/Semi thesaurus term
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パターニング

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JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

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Terms in the title (5)：
Terms in the title
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摩擦力顕微鏡

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, 
微細

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, 
機械加工

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, 
エッチング

About エッチング

, 
併用

About 併用


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