Rchr
J-GLOBAL ID：200901026529290753
Update date: Sep. 18, 2022
Ashida Kiwamu
アシダ キワム | Ashida Kiwamu
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Affiliation and department：
National Institute of Advanced Industrial Science and Technology
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Homepage URL (1)：
http://www.aist.go.jp/RESEARCHERDB/cgi-bin/worker_detail.cgi?call=namae&rw_id=K11683998
Research field (1)：
Manufacturing and production engineering
Research keywords (5)：
AFM
, マイクロファクトリ 走査プローブ顕微鏡
, マイクロプレス 工作機械
, ナノ機械加工
, 機械加工 超精密切削加工
MISC (18)：
Noritaka Kawasegi, Noboru Takano, Daisuke Oka, Noboru Morita, Shigeru Yamada, Kazutaka Kanda, Shigeto Takano, Tsutomu Obata, Kiwamu Ashida. Nanomachining of silicon surface using atomic force microscope with diamond tip. JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME. 2006. 128. 3. 723-729
Noritaka Kawasegi, Noboru Morita, Shigeru Yamada, Noboru Takano, Tatsuo Oyama, Kiwatnu Ashida, Jun Taniguchi, Iwao Miyamoto. Three-dimensional nanofabricalion utilizing selective etching of silicon induced by focused ion beam irradiation. JSME INTERNATIONAL JOURNAL SERIES C-MECHANICAL SYSTEMS MACHINE ELEMENTS AND MANUFACTURING. 2006. 49. 2. 583-589
Noritaka KAWASEGI, Tatsuya FUKASE, Noboru TAKANO, Noboru MORITA, Shigeru YAMADA, Tatsuo OYAMA, Kazutaka KANDA, Shigeto TAKANO, Tsutomu OBATA, Kiwamu ASHIDA. Development and Its Applications of Diamond Array Tool Using Silicon Mold (2nd Report). Journal of the Japan Society for Precision Engineering, Contributed Papers. 2006. 72. 8. 1025-1029
N Kawasegi, JW Park, N Morita, S Yamada, N Takano, T Oyama, K Ashida. Nanoscale fabrication in aqueous KOH solution using tribo-nanolithography. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. 2005. 23. 6. 2471-2475
N Kawasegi, N Morita, S Yamada, N Takano, T Oyama, K Ashida. Etch stop of silicon surface induced by tribo-nanolithography. NANOTECHNOLOGY. 2005. 16. 8. 1411-1414
ｍore...
Education (2)：
Chiba University Faculty of Engineering
Chiba University Graduate School of Science and Technology
Professional career (1)：
博士(工学)
Association Membership(s) (3)：
砥粒加工学会
, 日本機械学会
, 精密工学会
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