Art
J-GLOBAL ID：200902149621727228   Reference number：99A0432589

Micro/nanomechanical characterization of ceramic films for microdevices.

マイクロデバイス用セラミック膜のマイクロ/ナノメカニカル特性化
Author (2)：
LI X

About LI X

(Ohio State Univ., OH, USA)

About Ohio State Univ., OH, USA

, 
BHUSHAN B

About BHUSHAN B

(Ohio State Univ., OH, USA)

About Ohio State Univ., OH, USA


Material：
Thin Solid Films

About Thin Solid Films


Volume： 340  Issue： 1/2  Page： 210-217  Publication year： Feb. 26, 1999 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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*ceramic membrane

About ceramic membrane

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

,  Mechanical properties of solids in general 
(BL01021C)

About Mechanical properties of solids in general

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
マイクロデバイス

About マイクロデバイス

, 
セラミック膜

About セラミック膜

, 
マイクロ

About マイクロ

, 
ナノメカニカル特性

About ナノメカニカル特性


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