Art
J-GLOBAL ID：200902149750968061   Reference number：96A0521714

Surface Micromachined Accelerometers.

表面マイクロマシン加速度計
Author (2)：
BOSER B E

About BOSER B E

(Univ. California Berkeley, CA, USA)

About Univ. California Berkeley, CA, USA

, 
HOWE R T

About HOWE R T

(Univ. California Berkeley, CA, USA)

About Univ. California Berkeley, CA, USA


Material：
IEEE Journal of Solid-State Circuits  (IEEE J Solid-State Circuits)

About IEEE Journal of Solid-State Circuits


Volume： 31  Issue： 3  Page： 366-375  Publication year： Mar. 1996 
JST Material Number： B0761A  ISSN： 0018-9200  CODEN： IJSCBC  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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accelerometer

About accelerometer

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Measuring methods and instruments of time,speed,acceleration,angular veloc? 
(AD05040K)

About Measuring methods and instruments of time,speed,acceleration,angular veloc?

,  Manufacturing technology of solid-state devices 
(NC03030V)

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マイクロマシン

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, 
加速度計

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