Art
J-GLOBAL ID:200902151304004100   Reference number:02A0178367

Fabrication of single-crystal Si cantilever array.

単結晶Si片持梁の作製
Author (6):
Material:
Volume: A95  Issue: 2/3  Page: 281-287  Publication year: Jan. 01, 2002 
JST Material Number: B0345C  ISSN: 0924-4247  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
Thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
,...
   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=02A0178367&from=J-GLOBAL&jstjournalNo=B0345C") }}
JST classification (2):
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices  ,  Microscopy determination of structures 
Terms in the title (3):
Terms in the title
Keywords automatically extracted from the title.

Return to Previous Page