Art
J-GLOBAL ID：200902153486039810
Reference number：01A0052313
Single-Oriented Growth of (111) Cu Film on Thin ZrN/Zr Bilayered Film for ULSI Metallization.
ULSIのメタライゼーションのためのZrN/Zr二層薄膜上の(111)Cu薄膜の単一配向成長
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Author (4)：
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Material：
Volume：
39
Issue：
10
Page：
5987-5991
Publication year：
Oct. 15, 2000
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
Thesaurus term：
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Keywords indexed to the article.
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Semiconductor-metal contacts
, Metallic thin films
Reference (17)：
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1) S. Zaima and Y. Yasuda: Oyo Buturi 63 (1994) 1093 [in Japanese].
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2) T. Yamauchi, S. Zaima, K. Mizuno, Y. Koide and Y. Yasuda: J. Appl. Phys. 69 (1991) 7050.
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3) T. Takewaki, R. Kaihara, T. Ohmi and T. Nitta: Int. Electron Device Meet. Tech. Dig. (IEEE, New York, 1995) p. 253.
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4) C. Ryu, A. L. S. Loke, T. Nogami and S. S. Wong: Int. Reliability Phys. Symp., Denver (IEEE, New York, 1997) p. 201.
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5) K. Abe, Y. Harada and H. Onoda: J. Vac. Sci. & Technol. B <B>17</B> (1999) 1464.
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Terms in the title (7)：
Terms in the title
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