Art
J-GLOBAL ID：200902154251365414   Reference number：00A0123506

Effect of substrate temperature on the physical properties of DC reactive magnetron sputtered ZnO films

直流反応性マグネトロンスパッタZnO膜の物理的性質に及ぼす基板温度の効果
Author (3)：
SUBRAMANYAM T K

About SUBRAMANYAM T K

(Sri Vendateswara Univ., Tirupati, IND)

About Sri Vendateswara Univ., Tirupati, IND

, 
NAIDU B S

About NAIDU B S

(Sri Vendateswara Univ., Tirupati, IND)

About Sri Vendateswara Univ., Tirupati, IND

, 
UTHANNA S

About UTHANNA S

(Sri Vendateswara Univ., Tirupati, IND)

About Sri Vendateswara Univ., Tirupati, IND


Material：
Optical Materials  (Opt Mater)

About Optical Materials


Volume： 13  Issue： 2  Page： 239-247  Publication year： Nov. 1999 
JST Material Number： W0468A  ISSN： 0925-3467  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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All keywords is available on JDreamIII(charged).
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*transmissivity

About transmissivity

,...
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Semiconductor thin films 
(BK14040E)

About Semiconductor thin films

,  Optical properties of condensed matter in general 
(BM08010A)

About Optical properties of condensed matter in general

,  Electric conduction in crystalline semiconductors 
(BM03043X)

About Electric conduction in crystalline semiconductors

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
直流

About 直流

, 
反応性

About 反応性

, 
マグネトロンスパッタ

About マグネトロンスパッタ

, 
ZnO

About ZnO

, 
物理的性質

About 物理的性質

, 
基板温度

About 基板温度


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