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J-GLOBAL ID:200902154834586842   Reference number:97A0131741

A novel remote technique for high rate plasma polymerization with radio frequency plasmas.

高周波プラズマによる高速プラズマ重合の新しいリモート技術
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Material:
Volume: 86/87  Issue: 1/3 Pt 2  Page: 628-633  Publication year: Dec. 15, 1996 
JST Material Number: D0205C  ISSN: 0257-8972  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Radiation polymerization 
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