Art
J-GLOBAL ID：200902156577100880   Reference number：93A0835011

Hexagonal boron nitride synthesis by nitrogen ion implantation of boron films.

ほう素膜の窒素イオン注入による六方晶窒化ほう素合成
Author (2)：
BAAZI T

About BAAZI T

(Univ. Laval, Qu<span style=text-decoration:overline>e ́</span>., CAN)

About Univ. Laval, Qu<span style=text-decoration:overline>e ́</span>., CAN

, 
KNYSTAUTAS E J

About KNYSTAUTAS E J

(Univ. Laval, Qu<span style=text-decoration:overline>e ́</span>., CAN)

About Univ. Laval, Qu<span style=text-decoration:overline>e ́</span>., CAN


Material：
Thin Solid Films

About Thin Solid Films


Volume： 232  Issue： 2  Page： 185-193  Publication year： Sep. 25, 1993 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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ion implantation

About ion implantation

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

,  Vapor plating 
(WC08022K)

About Vapor plating

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
ほう素

About ほう素

, 
窒素イオン

About 窒素イオン

, 
注入

About 注入

, 
六方晶窒化ほう素

About 六方晶窒化ほう素


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