Art
J-GLOBAL ID：200902156873327210   Reference number：97A1031511

The Ultra Clean Sputtering Process and High Density Magnetic Recording Media.

超清浄スパッタリングプロセスと高密度磁気記録媒体
Author (3)：
TAKAHASHI M

About TAKAHASHI M

(Tohoku Univ., Sendai, JPN)

About Tohoku Univ., Sendai, JPN

, 
KIKUCHI A

About KIKUCHI A

(Tohoku Univ., Sendai, JPN)

About Tohoku Univ., Sendai, JPN

, 
KAWAKITA S

About KAWAKITA S

(Tohoku Univ., Sendai, JPN)

About Tohoku Univ., Sendai, JPN


Material：
IEEE Transactions on Magnetics  (IEEE Trans Magn)

About IEEE Transactions on Magnetics


Volume： 33  Issue： 5, Pt.1  Page： 2938-2943  Publication year： Sep. 1997 
JST Material Number： A0339B  ISSN： 0018-9464  CODEN： IEMGAQ  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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*magnetic disk

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,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
清浄化

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JST classification (1)：
JST classification
Category name(code) classified by JST.
Electronic recording,magnetic recording,optical recording 
(NC06020F)

About Electronic recording,magnetic recording,optical recording

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
スパッタリング

About スパッタリング

, 
プロセス

About プロセス

, 
高密度磁気記録媒体

About 高密度磁気記録媒体


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