Art
J-GLOBAL ID:200902156981136928   Reference number:01A0283997

Defect and electronic structures in TiSi2 thin films produced by co-sputtering. Part 1: Defect analysis by transmission electron microscopy.

共スパッタリングにより作製したTiSi2薄膜中の欠陥および電子構造 I 透過型電子顕微鏡による欠陥の解析
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Material:
Volume: 49  Issue:Page: 83-92  Publication year: Jan. 08, 2001
JST Material Number: A0316A  ISSN: 1359-6454  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Category name(code) classified by JST.
Thin films of other inorganic compounds  ,  Structure of other amorphous materials 

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