Art
J-GLOBAL ID：200902158001568021   Reference number：02A0322931

Structural and electrical properties of tantalum oxide films grown by photo-assisted pulsed laser deposition.

光支援パルスレーザ蒸着により成長させた酸化タンタル薄膜の構造及び電気特性
Author (2)：
ZHANG J-Y

About ZHANG J-Y

(Univ. Coll. London, London, GBR)

About Univ. Coll. London, London, GBR

, 
BOYD I W

About BOYD I W

(Univ. Coll. London, London, GBR)

About Univ. Coll. London, London, GBR


Material：
Applied Surface Science  (Appl Surf Sci)

About Applied Surface Science


Volume： 186  Issue： 1/4  Page： 40-44  Publication year： Jan. 28, 2002 
JST Material Number： B0707B  ISSN： 0169-4332  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*tantalum oxide

About tantalum oxide

,...
   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=02A0322931&from=J-GLOBAL&jstjournalNo=B0707B") }}
JST classification (2)：
JST classification
Category name(code) classified by JST.
Oxide thin films 
(BK14050P)

About Oxide thin films

,  Metal-insulator-semiconductor structures 
(BM03085X)

About Metal-insulator-semiconductor structures

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
支援

About 支援

, 
パルスレーザ蒸着

About パルスレーザ蒸着

, 
成長

About 成長

, 
酸化タンタル

About 酸化タンタル

, 
薄膜

About 薄膜

, 
電気特性

About 電気特性


Return to Previous Page

TOP

BOTTOM