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J-GLOBAL ID：200902159224312335   Reference number：95A0824920

Surface-science aspects of vacuum microelectronics.

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Author (2)：
SCHWOEBEL P R

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(SRI International, California)

About SRI International, California

, 
BRODIE I

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(SRI International, California)

About SRI International, California


Material：
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)

About Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures


Volume： 13  Issue： 4  Page： 1391-1410  Publication year： Jul. 1995 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 文献レビュー  Country of issue： United States (USA)  Language： ENGLISH (EN)
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microelectronics

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,...
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JST classification (3)：
JST classification
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Display equipment 
(NC06030Q)

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,  Thermoionic emission and field emission 
(BM09020S)

About Thermoionic emission and field emission

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

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