Art
J-GLOBAL ID:200902160680921880
Reference number:99A0093179
Epitaxial growth of TiN films by N-implantation into evaporated Ti films.
Ti蒸着膜中へのN注入によるTiN膜のエピタキシャル成長
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Author (8):
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Material:
Volume:
16
Issue:
6
Page:
3366-3375
Publication year:
Nov. 1998
JST Material Number:
C0789B
ISSN:
0734-2101
CODEN:
JVTAD6
Document type:
Article
Article type:
原著論文
Country of issue:
United States (USA)
Language:
ENGLISH (EN)
Thesaurus term:
Thesaurus term/Semi thesaurus term
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JST classification (1):
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds
Terms in the title (5):
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Keywords automatically extracted from the title.
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