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J-GLOBAL ID：200902161039982647
Reference number：96A1012233
Hydrofluoric-Treated GaAs Surfaces Analyzed by Contact Angle Measurement and Auger Electron Spectroscopy.
接触角測定とAuger電子分光で調べたふっ酸処理GaAs表面
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Author (4)：
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Material：
Volume：
35
Issue：
10
Page：
5293-5296
Publication year：
Oct. 1996
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
Reference (9)：
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OHNO, M. J.Electrochem.Soc. 1984, 131, 2441
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MENDA, K. Oyo Buturi. 1989, 58, 1517
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MENDA, K. Jpn.J.Appl.Phys. 1990, 29, L391
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ISRAEL, S. C. ACS Polym.Prepr. 1989, 30, 328
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SATO, Y. 52nd Autumn Meet., Japan Society of Applied Physics. 1991, 745
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