Deposition of thick diamond films by pulsed d.c. glow discharge CVD.

HARTMANN P; HAUBNER R; LUX B

Art

J-GLOBAL ID：200902161460105884 Reference number：96A0576125

Deposition of thick diamond films by pulsed d.c. glow discharge CVD.

パルスd.c.グロー放電CVDによるダイヤモンド圧膜の蒸着

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Author (3)： , ,
Material：
Volume： 5 Issue： 6/8 Page： 850-856 Publication year： May. 1996
JST Material Number： W0498A ISSN： 0925-9635 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Carbon and its compounds

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