Art
J-GLOBAL ID：200902162411394486   Reference number：02A0517367

Preparation and Characterization of ITO Films Using the rf-Magnetron Sputtering Method.

rf-マグネトロンスパッタにより調製したITO膜の特性評価
Author (3)：
MUKOZON MASANORI

About MUKOZON MASANORI

(東海大 開発工)

About 東海大 開発工

, 
UEMURA CHIKAO

About UEMURA CHIKAO

(東海大 開発工)

About 東海大 開発工

, 
KANEKO TOMOHIKO

About KANEKO TOMOHIKO

(東海大 開発工)

About 東海大 開発工


Material：
東海大学紀要 開発工学部  (Bulletin of School of High-Technology for Human Welfare, Tokai University)

About 東海大学紀要 開発工学部


Issue： 11  Page： 76-79  Publication year： 2001 
JST Material Number： L1465A  ISSN： 0917-7612  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
Thesaurus term：
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All keywords is available on JDreamIII(charged).
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*solar cell

About solar cell

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
ITO(solid solution)

About ITO(solid solution)


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Oxide thin films 
(BK14050P)

About Oxide thin films

,  Solar cell 
(NC03084O)

About Solar cell

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
RF

About RF

, 
マグネトロンスパッタ

About マグネトロンスパッタ

, 
調製

About 調製

, 
ITO膜

About ITO膜

, 
特性評価

About 特性評価


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