Art
J-GLOBAL ID：200902163285129239
Reference number：97A0698073
Temperature and concentration effects on ozone ashing of photoresist.
フォトレジストのオゾン灰化の温度効果と濃度効果
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Author (3)：
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Material：
Volume：
15
Issue：
3 Pt 2
Page：
1409-1412
Publication year：
May. 1997
JST Material Number：
C0789B
ISSN：
0734-2101
CODEN：
JVTAD6
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
Terms in the title (5)：
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