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J-GLOBAL ID:200902163370440903   Reference number:02A0109050

Slit Structure as a Countermeasure for the Thermal Deformation of a Metal Mask.

金属マスクの熱的変形に対する対応策としてのスリット構造
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Volume: 40  Issue: 12  Page: 7170-7173  Publication year: Dec. 15, 2001 
JST Material Number: G0520B  ISSN: 0021-4922  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Techniques and equipment of thin film deposition 
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