Slit Structure as a Countermeasure for the Thermal Deformation of a Metal Mask.

YAMAZAKI T; YOSHIZAWA T; YAMABUCHI T; HIROBAYASHI S; KIKUTA T; NAKATANI N; MIZUGUCHI T

Art

J-GLOBAL ID：200902163370440903 Reference number：02A0109050

Slit Structure as a Countermeasure for the Thermal Deformation of a Metal Mask.

金属マスクの熱的変形に対する対応策としてのスリット構造

Publisher site Copy service {{ this.onShowCLink("http://jdream3.com/copy/?sid=JGLOBAL&noSystem=1&documentNoArray=02A0109050&COPY=1") }}
Access JDreamⅢ for advanced search and analysis. {{ this.onShowJLink("http://jdream3.com/lp/jglobal/index.html?docNo=02A0109050&from=J-GLOBAL&jstjournalNo=G0520B") }}

Author (7)： , , , , , ,
Material：
Volume： 40 Issue： 12 Page： 7170-7173 Publication year： Dec. 15, 2001
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

,...

To see more with JDream III (charged). {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=02A0109050&from=J-GLOBAL&jstjournalNo=G0520B") }}

Techniques and equipment of thin film deposition

Reference (8)：

1) T. Yamazaki, Y. Yoshino, T. Yoshizawa, T. Yamabuchi, K. Terayama, T. Shimazaki and T. Mizuguchi: Jpn. J. Appl. Phys. 35 (1996) 4755.
2) T. Yamazaki, T. Yoshizawa, T. Yamabuchi, S. Hirobayashi, T. Kikuta and N. Nakatani: Proc. JSST 2000 Int. Conf. Modeling, Control and Computation in Simulation, Tokyo, Japan, 2000, p. 372.
3) T. Yoshizawa, T. Yamazaki, T. Yamabuchi, S. Hirobayashi, T. Kikuta and N. Nakatani: J. Jpn. Soc. Simulation Technol. 20 (2001) 71 [in Japanese].
4) T. Mizuguchi, M. Saoshita and G. Kugo: Japan Patent H. 09-202959 (1997) [in Japanese].
5) T. Mizuguchi, S. Saoshita and M. Sumita: Japan Patent H. 10-8239 (1998) [in Japanese].

ｍore...

, , ,

Return to Previous Page