Art

J-GLOBAL ID：200902165895614549   Reference number：98A0950543

Application of Gas Jet Deposition Method to Piezoelectric Thick Film Miniature Actuator.

ガスジェット堆積法の薄膜圧電ミニチュアアクチュエータへの適用

Author (4)： SCHROTH A (Agency of Industrial Sci. and Technol., Ministry of International Trade and Ind., Ibaraki, JPN) ,  MAEDA R (Agency of Industrial Sci. and Technol., Ministry of International Trade and Ind., Ibaraki, JPN) ,  AKEDO J (Agency of Industrial Sci. and Technol., Ministry of International Trade and Ind., Ibaraki, JPN) ,  ICHIKI M (Agency of Industrial Sci. and Technol., Ministry of International Trade and Ind., Ibaraki, JPN)
Material： Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers  (Japanese Journal of Applied Physics. Part 1. Regular Papers, Brief Communications & Review Papers)
Volume： 37  Issue： 9B  Page： 5342-5344  Publication year： Sep. 1998 
JST Material Number： G0520B  ISSN： 0021-4922  Document type： Article
Article type： 短報  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： ferroelectrics ,...
Semi thesaurus term： *PZT ,...

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JST classification (2)： Oxide thin films  (BK14050P) ,  Piezoelectric devices  (NC03110I)

Reference (2)：

• AKEDO, J. Proc. IEEE Workshop of MEMS '97. 1997, 135
• OHTUKA, Y. Proc. IEEE Workshop of MEMS '95. 1995, 306

Terms in the title (6)： ガスジェット ,  堆積 ,  薄膜 ,  圧電 ,  ミニチュア ,  アクチュエータ