Art
J-GLOBAL ID:200902165917879010   Reference number:95A0954258

Electron density fluctuations in a dusty Ar/SiH4 rf discharge.

ダスティーなAr/SiH4高周波放電における電子密度ゆらぎ
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Material:
Volume: 78  Issue:Page: 4867-4872  Publication year: Oct. 15, 1995 
JST Material Number: C0266A  ISSN: 0021-8979  CODEN: JAPIAU  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Plasma diagnostics 
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