Electron density fluctuations in a dusty Ar/SiH<sub>4</sub> rf discharge.

STOFFELS W W; STOFFELS E; KROESEN G M W; DE HOOG F J

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J-GLOBAL ID：200902165917879010 Reference number：95A0954258

Electron density fluctuations in a dusty Ar/SiH₄ rf discharge.

ダスティーなAr/SiH₄高周波放電における電子密度ゆらぎ

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Author (4)： , , ,
Material：
Volume： 78 Issue： 8 Page： 4867-4872 Publication year： Oct. 15, 1995
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIAU Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Plasma diagnostics

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Electron density fluctuations in a dusty Ar/SiH4 rf discharge.

Electron density fluctuations in a dusty Ar/SiH₄ rf discharge.