Finite Element Method Simulation of a New One-Chip-Style Quartz Crystal Motion Sensor with Two Functions of Gyro and Acceleration Detection.

KOITABASHI T; KUDO S; OKADA S; TOMIKAWA Y

Art

J-GLOBAL ID：200902167455430325 Reference number：01A1009147

Finite Element Method Simulation of a New One-Chip-Style Quartz Crystal Motion Sensor with Two Functions of Gyro and Acceleration Detection.

ジャイロおよび加速度検出の二機能を持つ新規一チップ型水晶運動センサの有限要素法シミュレーション

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Author (4)： , , ,
Material：
Volume： 40 Issue： 9B Page： 5756-5760 Publication year： Sep. 30, 2001
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Piezoelectric devices , Measuring methods and instruments of time,speed,acceleration,angular veloc?

Reference (3)：

YOKOYAMA, Y. Supohtsu I ・Kagaku. 1999, 12, No. 1, 23
SHIRATORI, N. Proc. 10th Int. Conf. Transducers '99, Sendai. 1999, 1598
Acoustic Wave Device Technology 150th committee of Japan Society for the Promotion of Science. Danseiha-soshi-gijutsu Handobukku (Handbook for Acoustic Wave Device Technology). 1991, 541

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