Solid-phase crystallization of Si<sub>1-x</sub>Ge<sub>x</sub> alloy layers.

YAMAGUCHI S; SUGII N; PARK S K; NAKAGAWA K; MIYAO M

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J-GLOBAL ID：200902167735297000 Reference number：01A0398870

Solid-phase crystallization of Si_1-xGe_x alloy layers.

Si_1-xGe_x合金層の固相結晶化

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Author (5)： , , , ,
Material：
Volume： 89 Issue： 4 Page： 2091-2095 Publication year： Feb. 15, 2001
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIAU Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Solid phase transitions

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Solid-phase crystallization of Si1-xGex alloy layers.

Solid-phase crystallization of Si_1-xGe_x alloy layers.