Art
J-GLOBAL ID：200902167735399075
Reference number：93A0682679
Interferometric profiler for rough surfaces.
粗い表面に対する干渉法によるプロフィラ
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Author (1)：
Material：
Volume：
32
Issue：
19
Page：
3438-3441
Publication year：
Jul. 01, 1993
JST Material Number：
B0026B
ISSN：
1559-128X
CODEN：
APOPAI
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Interferometry and interferometers
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