A Ru(II) η<sup>3</sup>-Allylic Complex as a Novel Precursor for the CVD of Ru- and RuO<sub>2</sub>-Nanostructured Thin Films.

BARRECA D; BUCHBERGER A; DAOLIO S; DEPERO L E; FABRIZIO M; MORANDINI F; RIZZI G A; SANGALETTI L; TONDELLO E

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J-GLOBAL ID：200902167773460179 Reference number：99A0747880

A Ru(II) η³-Allylic Complex as a Novel Precursor for the CVD of Ru- and RuO₂-Nanostructured Thin Films.

Ru-及びRuO₂-ナノ構造薄膜のCVDの新しい前駆体としてのRu(II)η³-アリル錯体

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Author (9)： , , , , , , , ,
Material：
Volume： 15 Issue： 13 Page： 4537-4543 Publication year： Jun. 22, 1999
JST Material Number： A0231B ISSN： 0743-7463 CODEN： LANGD5 Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Study of adsorption by physical means , Oxide thin films

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A Ru(II) η3-Allylic Complex as a Novel Precursor for the CVD of Ru- and RuO2-Nanostructured Thin Films.

A Ru(II) η³-Allylic Complex as a Novel Precursor for the CVD of Ru- and RuO₂-Nanostructured Thin Films.