Art
J-GLOBAL ID：200902169836393933   Reference number：96A0333370

Growth and mechanical anisotropy of TiN thin films.

TiN薄膜の成長と機械的異方性
Author (2)：
MENG W J

About MENG W J

(General Motors Res . and Dev. Center, MI, USA)

About General Motors Res . and Dev. Center, MI, USA

, 
EESLEY G L

About EESLEY G L

(General Motors Res . and Dev. Center, MI, USA)

About General Motors Res . and Dev. Center, MI, USA


Material：
Thin Solid Films

About Thin Solid Films


Volume： 271  Issue： 1/2  Page： 108-116  Publication year： Dec. 15, 1995 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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magnetron sputtering

About magnetron sputtering

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

,  Acoustical properties of solids in general 
(BL02031U)

About Acoustical properties of solids in general

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
TiN薄膜

About TiN薄膜

, 
成長

About 成長

, 
異方性

About 異方性


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