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J-GLOBAL ID:200902170579965082   Reference number:98A0766959

Piezocomposite of Fine PZT Rods Realized with Synchrotron Radiation Lithography.

シンクロトロン放射リソグラフィーで実現した微細PZTロッドの圧電複合材
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Volume: 1997  Issue: Vol.2  Page: 877-881  Publication year: 1997 
JST Material Number: A0437C  ISSN: 1051-0117  Document type: Proceedings
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Excitation and generation of sounds  ,  Manufacturing technology of solid-state devices 

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