About MICHEL B
About IBM Res., Rueschlikon, CHE
About BERNARD A
About LifeBits AG, Tuebingen, DEU
About BIETSCH A
About IBM Res., Rueschlikon, CHE
About DELAMARCHE E
About IBM Res., Rueschlikon, CHE
About GEISSLER M
About IBM Res., Rueschlikon, CHE
About KIND H
About Univ. California, California
About RENAULT J-P
About Commissariat a l’Energie Atomique, Gif Sur Yvette, FRA
About SCHMIDT-WINKEL P
About Merck AG, Damstadt, DEU
About WOLF H
About IBM Res., Rueschlikon, CHE
About IBM Journal of Research and Development
About lithography
About Manufacturing technology of solid-state devices
About リソグラフィー
About 高分解能
About 手法