Art
J-GLOBAL ID:200902172747029501   Reference number:96A0481519

Imprint Lithography with 25-Nanometer Resolution.

25nm分解能をもつ転写リソグラフィー
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Volume: 272  Issue: 5258  Page: 85-87  Publication year: Apr. 05, 1996 
JST Material Number: E0078A  ISSN: 0036-8075  CODEN: SCIEA  Document type: Article
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices 
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