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J-GLOBAL ID:200902173690978010   Reference number:00A0437151

Improved contact performance of GaN film using Si diffusion.

Siの拡散を使うGaN膜のコンタクト性能の改善
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Volume: 76  Issue: 14  Page: 1878-1880  Publication year: Apr. 03, 2000 
JST Material Number: H0613A  ISSN: 0003-6951  CODEN: APPLAB  Document type: Article
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Semiconductor-metal contacts  ,  Diffusion in solids in general 
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