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J-GLOBAL ID:200902174902677216   Reference number:99A0419989

Capacitor-on Metal/Via-stacked-Plug(CMVP) Memory Cell for 0.25μm CMOS Embedded FeRAM.

0.25μm CMOS論理埋め込みFeRAMのためのCMVP(Capacitor-on-Metal/Via-stacked-Plug)メモリセル
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Volume: 1998  Page: 363-366  Publication year: 1998 
JST Material Number: C0829B  ISSN: 0163-1918  Document type: Proceedings
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Ferroelectrics,antiferroelectrics and ferroelasticity  ,  Semiconductor integrated circuit 
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