Ultrathin Ta<sub>2</sub>O<sub>5</sub> Film Capacitor with Bottom Electrode.

AOYAMA T; YAMAZAKI S; IMAI K

Art

J-GLOBAL ID：200902175092259656 Reference number：98A0782749

Ultrathin Ta₂O₅ Film Capacitor with Bottom Electrode.

Ru下地電極をもつTa₂O₅超薄膜コンデンサ

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Author (3)： , ,
Material：
Volume： 145 Issue： 8 Page： 2961-2964 Publication year： Aug. 1998
JST Material Number： C0285A ISSN： 1945-7111 CODEN： JESOAN Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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LCR parts , Manufacturing technology of solid-state devices

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Ultrathin Ta2O5 Film Capacitor with Bottom Electrode.

Ultrathin Ta₂O₅ Film Capacitor with Bottom Electrode.