Art
J-GLOBAL ID:200902175092259656   Reference number:98A0782749

Ultrathin Ta2O5 Film Capacitor with Bottom Electrode.

Ru下地電極をもつTa2O5超薄膜コンデンサ
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Volume: 145  Issue:Page: 2961-2964  Publication year: Aug. 1998 
JST Material Number: C0285A  ISSN: 1945-7111  CODEN: JESOAN  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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LCR parts  ,  Manufacturing technology of solid-state devices 
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