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J-GLOBAL ID:200902175242162265   Reference number:99A0050735

Morphology Control of Cu Clusters Formed on H-Si(111) Surface in Solution by Si Potential.

溶液中のH-Si(111)表面上で形成されるCuクラスタのSiポテンシャルによる形態制御
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Volume: 37  Issue: 11A  Page: L1333-L1335  Publication year: Nov. 01, 1998 
JST Material Number: F0599B  ISSN: 0021-4922  Document type: Article
Article type: 短報  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Atomic and molecular clusters 
Reference (7):
  • 1) D. H. Huang and M. Aono: J. Vac. Sci. & Technol. B<b>12</b> (1994) 2429
  • 2) K. Uemura and K. Shimanoe: Proc. Fourth Int. Symp. Cleaning Technology in Semiconductor Device Manufacturing, eds. R. E. Novak and J. Ruzyllo (Electrochem. Soc, New Jersey, 1996) p. 292.
  • 3) K. Hara and I. Ohdomari: to be published in IEICE-C [in Japanese].
  • 4) A. J. Bard and L. R. Faulkner: <i>Electrochemical Methods</i> (John Wiley & Sons, NY, 1980) p. 637.
  • 5) T. Ogino, H. Hibino and Y. Homma: Jpn. J. Appl. Phys. 34 (1995) L668
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