Low temperature growth of multi-wall carbon nanotubes assisted by mesh potential using a modified plasma enhanced chemical vapor deposition system.

KANG H S; YOON H J; KIM C O; HONG J P; HAN I T; CHA S N; SONG B K; LEE N S; KIM J M

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J-GLOBAL ID：200902175456435323 Reference number：02A0110912

Low temperature growth of multi-wall carbon nanotubes assisted by mesh potential using a modified plasma enhanced chemical vapor deposition system.

改良型プラズマ増強・化学蒸着系での網状電位の補助による多重壁型炭素ナノチューブの低温成長

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Material：
Volume： 349 Issue： 3/4 Page： 196-200 Publication year： Nov. 30, 2001
JST Material Number： B0824A ISSN： 0009-2614 Document type： Article
Article type：短報 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Atomic and molecular clusters , Reaction due to charged particle bombardment and electric discharge

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