Low-coherence interferometer system for the simultaneous measurement of refractive index and thickness.

MARUYAMA H; INOUE S; MITSUYAMA T; OHMI M; HARUNA M

Art

J-GLOBAL ID：200902175847297812 Reference number：02A0261668

Low-coherence interferometer system for the simultaneous measurement of refractive index and thickness.

屈折率および膜厚の同時計測のための低コヒーレンス干渉計システム

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Author (5)： , , , ,
Material：
Volume： 41 Issue： 7 Page： 1315-1322 Publication year： Mar. 01, 2002
JST Material Number： B0026B ISSN： 1559-128X CODEN： APOPAI Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Interferometry and interferometers , Optical properties of condensed matter in general

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