Art
J-GLOBAL ID：200902176065204293
Reference number：00A0122649
Quantitative surface area evaluation of rugged polycrystalline Si plate for dynamic random access memory capacitor by xenon adsorption.
ダイナミックランダムアクセスメモリコンデンサ用の凹凸のある多結晶シリコンプレートの表面積のキセノン吸着による定量評価
-
Publisher site
Copy service
{{ this.onShowCLink("http://jdream3.com/copy/?sid=JGLOBAL&noSystem=1&documentNoArray=00A0122649©=1") }}
-
Access JDreamⅢ for advanced search and analysis.
{{ this.onShowJLink("http://jdream3.com/lp/jglobal/index.html?docNo=00A0122649&from=J-GLOBAL&jstjournalNo=E0974A") }}
Author (3)：
,
,
Material：
Volume：
17
Issue：
6
Page：
2656-2659
Publication year：
Nov. 1999
JST Material Number：
E0974A
ISSN：
1071-1023
CODEN：
JVTBD9
Document type：
Article
Article type：
短報
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
,...
JST classification (2)：
JST classification
Category name(code) classified by JST.
Semiconductor integrated circuit
, Techniques for samples
Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
,
,
,
,
,
Return to Previous Page
