Crystallization behavior of sputter-deposited amorphous Ge2Sb2Te5 thin films.

JEONG T H; KIM M R; SEO H; KIM S J; KIM S Y

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J-GLOBAL ID：200902176577366511 Reference number：99A0737041

Crystallization behavior of sputter-deposited amorphous Ge₂Sb₂Te₅ thin films.

スパッタ堆積非晶質Ge₂Sb₂Te₅薄膜の結晶化挙動

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Author (5)： , , , ,
Material：
Volume： 86 Issue： 2 Page： 774-778 Publication year： Jul. 15, 1999
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIAU Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Semiconductor thin films

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