Art
J-GLOBAL ID：200902177524812141   Reference number：97A0872546

New technique for nanocantilever fabrication based on local electrochemical etching: Applications to scanning force microscopy.

局所電解エッチングに基づくナノ片持梁の新しい作製法 走査型力顕微鏡への適用
Author (5)：
HOUMMADY M

About HOUMMADY M

(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN

, 
FARNAULT E

About FARNAULT E

(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN

, 
FUJITA H

About FUJITA H

(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN

, 
KAWAKATSU H

About KAWAKATSU H

(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN

, 
MASUZAWA T

About MASUZAWA T

(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN


Material：
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)

About Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures


Volume： 15  Issue： 4  Page： 1556-1558  Publication year： Jul. 1997 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
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All keywords is available on JDreamIII(charged).
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atomic force microscope

About atomic force microscope

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
動的モード制御

About 動的モード制御

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Microscopy determination of structures 
(BK01040E)

About Microscopy determination of structures

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
電解エッチング

About 電解エッチング

, 
片持梁

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, 
作製法

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, 
走査型力顕微鏡

About 走査型力顕微鏡


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