Art
J-GLOBAL ID：200902177983877663
Reference number：01A0292787
Emerging Simulation Approaches for Micromachined Devices.
マイクロマシン加工デバイスのためのシミュレーションアプローチの出現
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Author (4)：
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Material：
Volume：
19
Issue：
12
Page：
1572-1589
Publication year：
Dec. 2000
JST Material Number：
B0142C
ISSN：
0278-0070
CODEN：
ITCSDI
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
, CAD,CAM
Terms in the title (2)：
Terms in the title
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