Art
J-GLOBAL ID：200902181297935077   Reference number：98A0198314

Kinetics of Initial Layer-by-Layer Oxidation of Si(001) Surfaces.

Si(001)面の初期の層毎の酸化の速度論
Author (7)：
WATANABE H

About WATANABE H

(Joint Res. Center for Atom Technol., Angstrom Technol. Partnership(JRCAT-ATP), Ibaraki, JPN)

About Joint Res. Center for Atom Technol., Angstrom Technol. Partnership(JRCAT-ATP), Ibaraki, JPN

, 
KATO K

About KATO K

(Joint Res. Center for Atom Technol., Angstrom Technol. Partnership(JRCAT-ATP), Ibaraki, JPN)

About Joint Res. Center for Atom Technol., Angstrom Technol. Partnership(JRCAT-ATP), Ibaraki, JPN

, 
UDA T

About UDA T

(Joint Res. Center for Atom Technol., Angstrom Technol. Partnership(JRCAT-ATP), Ibaraki, JPN)

About Joint Res. Center for Atom Technol., Angstrom Technol. Partnership(JRCAT-ATP), Ibaraki, JPN

, 
FUJITA K

About FUJITA K

(Joint Res. Center for Atom Technol., Angstrom Technol. Partnership(JRCAT-ATP), Ibaraki, JPN)

About Joint Res. Center for Atom Technol., Angstrom Technol. Partnership(JRCAT-ATP), Ibaraki, JPN

, 
ICHIKAWA M

About ICHIKAWA M

(Joint Res. Center for Atom Technol., Angstrom Technol. Partnership(JRCAT-ATP), Ibaraki, JPN)

About Joint Res. Center for Atom Technol., Angstrom Technol. Partnership(JRCAT-ATP), Ibaraki, JPN

, 
KAWAMURA T

About KAWAMURA T

(Yamanashi Univ., Yamanashi, JPN)

About Yamanashi Univ., Yamanashi, JPN

, 
TERAKURA K

About TERAKURA K

(Joint Res. Center for Atom Technol., National Inst. Advanced Interdisciplinary Res.(JRCAT-NAIR), Ibaraki, JPN)

About Joint Res. Center for Atom Technol., National Inst. Advanced Interdisciplinary Res.(JRCAT-NAIR), Ibaraki, JPN


Material：
Physical Review Letters  (Phys Rev Lett)

About Physical Review Letters


Volume： 80  Issue： 2  Page： 345-348  Publication year： Jan. 12, 1998 
JST Material Number： H0070A  ISSN： 0031-9007  CODEN： PRLTAO  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
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silicon

About silicon

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
reflection electron microscope

About reflection electron microscope


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Surface structure of semiconductors 
(BK15030A)

About Surface structure of semiconductors

,  Other noncatalytic reactions 
(CB06070U)

About Other noncatalytic reactions

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
Si

About Si

, 
初期

About 初期

, 
層

About 層

, 
酸化

About 酸化

, 
速度論

About 速度論


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