Art
J-GLOBAL ID：200902181451555436
Reference number：02A0127870
Application of On-Wafer TRL Calibration on the Measurement of Microwave Properties of Ba0.5Sr0.5TiO3 Thin Films.
Ba0.5Sr0.5TiO3薄膜のマイクロ波特性の測定におけるウェーハ上TRL較正の応用
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Author (2)：
,
Material：
Volume：
48
Issue：
6
Page：
1640-1647
Publication year：
Nov. 2001
JST Material Number：
H0369A
ISSN：
0885-3010
CODEN：
ITUCER
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Transmission lines
, Oxide thin films
, Ferroelectrics,antiferroelectrics and ferroelasticity
Terms in the title (5)：
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